VSAC

알림

리니어모듈

다관절로봇

제품 사양

Specificatioin		VSAC8	VSA4
General Information	Type	X Z R Motion	X (Air Cylinder Motion)
	Carrying Object	2/4/6/8/12 inch Available (200mm / 300mm)	4 inch Wafer
	Weight	Approx. 6kg
Performance	Sensing
	Off-center Limit	Within ±5mm
	Positioning Time	≤ 6sec
	Centering accuracy	±0.1mm	±0.1mm
	Rotating accuracy	±0.1deg (3 Axis)
H/W Config	Driving Method	2-phase stepping motor (PEEK)
H/W Config	Holding Method	Vacuum Chuck
Utility	Power Source	DC24V ±10% 5A	DC24V ±10% 5A
Utility	Vacuum	≤ - 80kPa
Others	User Interface	RS232C	RS232C

시스템 상담